Masami OTUKA
Papers
1
Total Citations
2
H-Index
1
About
Masami Otuka is a precision engineering researcher whose work focuses on non-contact transportation systems for large, delicate substrates like semiconductor wafers and flat-panel displays. His key contributions lie in the innovative combination of ultrasonically induced acoustic viscous forces with aerostatic (air-bearing) forces to create contactless handling solutions. This approach addresses the critical challenge of transporting increasingly larger and heavier substrates without physical contact, which is essential to prevent damage, contamination, and particle generation in high-tech manufacturing. His 2008 paper, "Fabrication of Non-contact Transportation System by Combination of Ultrasonically Acoustic Viscous Force and Aerostatic Force," though with modest citation count, represents foundational work in this niche field. Otuka’s research is notable for its practical engineering focus, bridging fundamental acoustofluidics and industrial automation. His work contributes to the advancement of clean, reliable handling methods essential for next-generation semiconductor and display production lines.
Research Focus
Key Achievements
Top Papers
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