Study on Design and Decoupling Test of a Miniature Three Dimensions Force Sensor

Abstract

A miniature resistance strain three dimensions force sensor with a new elastomer structure is developed.This structure has multiple slots from top to bottom.Four pieces of resistance strain gauges which are used for the detection of three-dimension force affixed to the sides of the elastomer.The displacement variety of elastomer is translated into dependent variable of strain gauges.It is analyzed the elastomer ' s decoupling performance of the sensor by using the simulation of Finite Element Analysis to analyze the relationship between force and strain.Focus on the three-dimension force sensor,it gets the three-dimension force decoupling matrix,through static calibration and decoupling calculation.Three-dimension force experiment shows that the sensor has high accuracy,and effectively eliminate the coupling among the three dimension,and has fulfilled the demands of the small scale force feedback control of the miniature robot.