Sub‐Milliscale‐Resolution Bimodal Tactile Sensor Array with Human‐Skin‐Like Graphesthesia Sensation

Abstract

ABSTRACT Multimodal sensory integration advances the development of embodied intelligent systems and robotics with human‐skin‐like tactile perception. However, the difficulties in simultaneously achieving high resolution and multimodality hamper the exquisite tactile perception to differentiate information through touching. In this study, we report a sub‐milliscale‐resolution bimodal tactile sensor array consisting of a piezoelectric sensor array for mapping pressure magnitude distribution and a triboelectric sensor array for contact height detection, enabling the calculation of Young's modulus distribution. As compared to existing studies, the bimodal tactile sensor array achieved sub‐milliscale spatial resolution of 700 µm and relatively high sensor density of 226 pixels/cm 2 , demonstrating fine‐grained multimodal perception. By combining the pressure mapping information from the piezoelectric sensor array and contact height information from the triboelectric sensor array, with a rapid response time of 50 ms, the Young's modulus distribution can be revealed. Furthermore, the tactile sensor array can achieve human‐skin‐like graphesthesia sensation and reconstruct the softness‐encrypted pattern with the assistance of deep learning algorithms, providing a paradigm‐shift strategy of sub‐milliscale‐resolution tactile perception toward embodied intelligence and robotics.