A microfabricated flexible slip sensor

Abstract

Slip sensors are useful in robotics and prosthetics to improve the precision of force control during manipulation tasks. This work describes the design and fabrication of a flexible slip microsensor with no-moving parts, based on thermo-electrical phenomena. The sensor has been tested on a purposively developed test bench capable of producing a repeatable and controllable slip velocity. Experimental results are reported, demonstrating microsensor capability of discriminating slip events. The flexibility of the sensor makes it suitable for its integration on curved or deformable surfaces, such as robotic finger pads.