OTHER
Development of a single-chip elasticity sensor using MEMS-based piezoresistive cantilevers with different tactile properties
Thanh‐Vinh Nguyen, Ryota Tanii, Tomoyuki Takahata, Isao Shimoyama
- Year
- 2018
- Citations
- 19
Keywords
CantileverPiezoresistive effectElasticity (physics)Tactile sensorPolydimethylsiloxaneMicroelectromechanical systemsStiffnessMaterials scienceAcousticsFabrication
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