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Development of a single-chip elasticity sensor using MEMS-based piezoresistive cantilevers with different tactile properties

Thanh‐Vinh Nguyen, Ryota Tanii, Tomoyuki Takahata, Isao Shimoyama

发表年份
2018
引用次数
19

关键词

CantileverPiezoresistive effectElasticity (physics)Tactile sensorPolydimethylsiloxaneMicroelectromechanical systemsStiffnessMaterials scienceAcousticsFabrication

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