OTHER
A novel MEMS triboelectric energy harvester and sensor with a high vibrational operating frequency and wide bandwidth fabricated using UV-LIGA technique
H. M. Ashfiqul Hamid, Zeynep Çelik‐Butler
- Year
- 2020
- Citations
- 30
Keywords
Triboelectric effectPower densityLIGAMicroelectromechanical systemsMaterials scienceEnergy harvestingFabricationBandwidth (computing)OptoelectronicsElectrical engineering
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