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A novel MEMS triboelectric energy harvester and sensor with a high vibrational operating frequency and wide bandwidth fabricated using UV-LIGA technique

H. M. Ashfiqul Hamid, Zeynep Çelik‐Butler

发表年份
2020
引用次数
30

关键词

Triboelectric effectPower densityLIGAMicroelectromechanical systemsMaterials scienceEnergy harvestingFabricationBandwidth (computing)OptoelectronicsElectrical engineering

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