A Microassembly System for the Flexible Assembly of Hybrid Robotic Mems Devices

Abstract

This paper presents a full 6 DOF microassembly system that features a novel remote center of motion configuration paired with advanced vision and illumination modules, as well as innovative user interaction concepts. Even though the semi-automatic design is primarily focused on the assembly of 3D bio-microrobotic devices out of individual 2.5D MEMS components, it can be configured for a large variety of assembly tasks. A gripper exchange mechanism allows reaching for parts with dimensions ranging from 5–800 µm and a micro-fabricated platform featuring a special pattern provides a structured working area. The assembly of a miniature bio-microrobot is presented to demonstrate the dexterity and powerful features of this system. The underlying microassembly station combines multiple concepts for another step towards full manipulation automation in industrial and research applications.