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Piezoelectric PZT MEMS technologies for small-scale robotics and RF applications

Jeffrey S. Pulskamp, Ronald G. Polcawich, Ryan Q. Rudy, Sarah S. Bedair, Robert M. Proie, Tony Ivanov, Gabriel L. Smith

Year
2012
Citations
121

Keywords

Microelectromechanical systemsRoboticsMaterials sciencePiezoelectricityScale (ratio)Artificial intelligenceNanotechnologyComputer scienceSystems engineeringAerospace engineering

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