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Piezoelectric PZT MEMS technologies for small-scale robotics and RF applications

Jeffrey S. Pulskamp, Ronald G. Polcawich, Ryan Q. Rudy, Sarah S. Bedair, Robert M. Proie, Tony Ivanov, Gabriel L. Smith

发表年份
2012
引用次数
121

关键词

Microelectromechanical systemsRoboticsMaterials sciencePiezoelectricityScale (ratio)Artificial intelligenceNanotechnologyComputer scienceSystems engineeringAerospace engineering

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