Wafer manipulating robots: design, programming and simulation

摘要

The paper presents achievements made in original works performed by authors in the field of virtual prototyping atmospherical wafer manipulating robots and specific application for atmospherical wafer manipulation tasks. There are succesively presented virtual prototypes of a four degrees of freedom SCARA robot type for wafer atmospherical manipulation, and wafer processing equipment including atmospherical operation area, peripheral equipment for wafer storage and above mentioned robot, as well as specific software modules for robot manual control and teach-in and real time robot programming and simulation. Key-Words: wafer, robot, virtual prototyping, programming, simulation