OTHER
Mechanisms of strain rate effect on the material removal and surface formation of single-crystal silicon in robotic polishing
Yikai Zang, Changlin Liu, Jinyang Ke, Zhongdi She, Jianning Chu, Junfeng Xiao, Jianguo Zhang, Jianfeng Xu
- 发表年份
- 2025
- 引用次数
- 2
关键词
PolishingMaterials scienceSiliconStrain (injury)Composite materialSurface (topology)Single crystalNanotechnologyCrystallographyOptoelectronics
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