Locomotion Control of <scp>MEMS</scp> Microrobot Using Pulse‐Type Hardware Neural Networks

摘要

SUMMARY This paper presents the locomotion control of a microelectromechanical system ( MEMS ) microrobot. The MEMS microrobot demonstrates locomotion control by pulse‐type hardware neural networks (P‐ HNN ). P‐ HNN generate oscillatory patterns of electrical activity like those of living organisms. The basic component of P‐ HNN is a pulse‐type hardware neuron model (P‐ HNM ). The P‐ HNM has the same basic features as biological neurons, such as the threshold, the refractory period, and spatiotemporal summation characteristics, and allows the generation of continuous action potentials. P‐ HNN has been constructed with MOSFETs and can be integrated by CMOS technology. Like living organisms, P‐ HNN has realized robot control without using software programs or A/D converters. The size of the microrobot fabricated by MEMS technology was 4 × 4 × 3.5 mm. The frame of the robot was made of a silicon wafer, equipped with rotary actuators, link mechanisms, and six legs. The MEMS microrobot emulated the locomotion method and the neural networks of an insect by rotary actuators, link mechanisms, and the P‐ HNN . We show that the P‐ HNN can control the forward and backward locomotion of the fabricated MEMS microrobot, and that it is possible to switch its direction by inputting an external trigger pulse. The locomotion speed was 19.5 mm/min and the step size was 1.3 mm. © 2013 Wiley Periodicals, Inc. Electr Eng Jpn, 186(3): 43–50, 2014; Published online in Wiley Online Library ( wileyonlinelibrary.com ). DOI 10.1002/eej.22473