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Study on optimization of the dynamic performance of the robot bonnet polishing system

Ri Pan, Chunfu Hu, Jinwei Fan, Zhenzhong Wang, Xuepeng Huang, Feng Lu

发表年份
2023
引用次数
4

关键词

PolishingVibrationMachiningModal analysisNatural frequencyModalControl theory (sociology)Chemical-mechanical planarizationEngineeringStructural engineering

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