A trial of flow disturbance suppression for pneumatic anti-vibration apparatus using internal information in central pattern generator

摘要

Pneumatic anti-vibration apparatus (AVA) has been used for suppression of vibration from floor in the field like semiconductor manufacturing. The compressed air supplied to the pneumatic AVA is generated by the air compressor. During the compression process of the air, the pressure of the compressed air varies. Consequently, the pressure variation changes the flow rate of the air supplied to the pneumatic AVA, which is called flow disturbance. Based on the internal model principle, the suppression of vibration of AVA due to flow disturbance has been confirmed by using Central Pattern Generator (CPG). Previous studies in the field of biology have confirmed the existence of a neuronal network that generates a walking rhythm in the spinal cord of an organism, and this is called CPG. Some researchers have applied CPG to such as walking of biped-robots. However, there are no applications using information inside CPG. This letter proposes using internal information in CPG as new method for further vibration suppression, compared with the conventional method. Specifically, this method makes use of outputs corresponding to differential and integral signals inside the CPG. It is shown the effectiveness of the proposed method by experimental results.