OTHER
Vibration Control of Semiconductor Wafer Transfer Robot by Building an Integrated Tool of Parameter Identification and Input Shaping
Wisnu Aribowo, Takahito YAMASHITA, Kazuhiko Terashima, Yoji Masui, Toru Saeki, Toshio Kamigaki, Hirotoshi Kawamura
- 发表年份
- 2011
- 引用次数
- 10
关键词
WaferIdentification (biology)VibrationRobotControl engineeringSemiconductorEngineeringControl (management)Input shapingVibration control
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