OTHER
Vibration Control of Semiconductor Wafer Transfer Robot by Building an Integrated Tool of Parameter Identification and Input Shaping
Wisnu Aribowo, Takahito YAMASHITA, Kazuhiko Terashima, Yoji Masui, Toru Saeki, Toshio Kamigaki, Hirotoshi Kawamura
- Year
- 2011
- Citations
- 10
Keywords
WaferIdentification (biology)VibrationRobotControl engineeringSemiconductorEngineeringControl (management)Input shapingVibration control
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