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A sub-micron metallic electrothermal gripper

Daniel Sang-Won Park, Arun K. Nallani, DonKyu Cha, Gil-Sik Lee, Moon J. Kim, George D. Skidmore, Jeong‐Bong Lee

发表年份
2009
引用次数
12

关键词

ElectroplatingMaterials scienceElectron-beam lithographyLithographyBent molecular geometryFocused ion beamFabricationScanning electron microscopeBeam (structure)Nanolithography

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