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A sub-micron metallic electrothermal gripper

Daniel Sang-Won Park, Arun K. Nallani, DonKyu Cha, Gil-Sik Lee, Moon J. Kim, George D. Skidmore, Jeong‐Bong Lee

Year
2009
Citations
12

Keywords

ElectroplatingMaterials scienceElectron-beam lithographyLithographyBent molecular geometryFocused ion beamFabricationScanning electron microscopeBeam (structure)Nanolithography

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