Recent Advances in the Application of Piezoelectric Materials in Microrobotic Systems

摘要

Recent advances in precision manufacturing technology and a thorough understanding of the properties of piezoelectric materials have made it possible for researchers to develop innovative microrobotic systems, which draw more attention to the challenges of utilizing microrobots in areas that are inaccessible to ordinary robots. This review paper provides an overview of the recent advances in the application of piezoelectric materials in microrobots. The challenges of microrobots in the direction of autonomy are categorized into four sections: mechanisms, power, sensing, and control. In each section, innovative research ideas are presented to inspire researchers in their prospective microrobot designs according to specific applications. Novel mechanisms for the mobility of piezoelectric microrobots are reviewed and described. Additionally, as the piezoelectric micro-actuators require high-voltage electronics and onboard power supplies, we review ways of energy harvesting technology and lightweight micro-sensing mechanisms that contain piezoelectric devices to provide feedback, facilitating the use of control strategies to achieve the autonomous untethered movement of microrobots.