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Electrochemical mechanical polishing technology: recent developments and future research and industrial needs

Abdelkhalick Mohammad, Danwei Wang

发表年份
2016
引用次数
90

关键词

PolishingChemical-mechanical planarizationMechanical engineeringReconfigurabilityProcess (computing)Engineering drawingFlexibility (engineering)Materials scienceManufacturing engineeringComputer science

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