OTHER
Electrochemical mechanical polishing technology: recent developments and future research and industrial needs
Abdelkhalick Mohammad, Danwei Wang
- Year
- 2016
- Citations
- 90
Keywords
PolishingChemical-mechanical planarizationMechanical engineeringReconfigurabilityProcess (computing)Engineering drawingFlexibility (engineering)Materials scienceManufacturing engineeringComputer science
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