Microfabrication

Related papers: 20

Top Cited Papers

3D Printed Enzymatically Biodegradable Soft Helical Microswimmers

Xiaopu Wang, Xiao‐Hua Qin, Chengzhi Hu, Anastasia Terzopoulou, Xiangzhong Chen, Tian‐Yun Huang, Katharina Maniura‐Weber, Salvador Pané, Bradley J. Nelson

Citations: 363 • 2018

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

Paul Muralt, Ronald G. Polcawich, Susan Trolier‐McKinstry

Citations: 363 • 2009

Flexible microfluidic normal force sensor skin for tactile feedback

Ruben D. Ponce Wong, Jonathan D. Posner, Veronica J. Santos

Citations: 251 • 2012

NeuroMEMS: Neural Probe Microtechnologies

Mohamad Hajj‐Hassan, Vamsy P. Chodavarapu, Sam Musallam

Citations: 189 • 2008

Giant-Amplitude, High-Work Density Microactuators with Phase Transition Activated Nanolayer Bimorphs

Kai Liu, Chun Cheng, Zhenting Cheng, Kevin Wang, R. Ramesh, Junqiao Wu

Citations: 178 • 2012

Making Things by Self-Assembly

Mila Boncheva, George M. Whitesides

Citations: 175 • 2005

Three-dimensional printing of freeform helical microstructures: a review

Rouhollah D. Farahani, Kambiz Chizari, Daniel Therriault

Citations: 162 • 2014

A flexible capacitive tactile sensing array with floating electrodes

M-Y. Cheng, X.-H. Huang, C-W Ma, Y-J Yang

Citations: 144 • 2009

Targeted Drug Delivery and Imaging Using Mobile Milli/Microrobots: A Promising Future Towards Theranostic Pharmaceutical Design

Ajay Vikram Singh, Metin Sitti

Citations: 129 • 2016

Emergence of microfluidic wearable technologies

Joo Chuan Yeo, Kenry Kenry, Chwee Teck Lim

Citations: 109 • 2016

A Flexible Microrobot-Based Microassembly Station

Sergej Fatikow, J. Seyfried, St. Fahlbusch, A. Buerkle, Ferdinand Schmoeckel

Citations: 109 • 2000

A thin-film temperature sensor based on a flexible electrode and substrate

Zhaojun Liu, Bian Tian, Bingfei Zhang, Jiangjiang Liu, Zhongkai Zhang, Song Wang, Yunyun Luo, Libo Zhao, Peng Shi, Qijing Lin, Zhuangde Jiang

Citations: 105 • 2021

Microfabricated Tactile Sensors for Biomedical Applications: A Review

Paola Saccomandi, Emiliano Schena, Calogero Maria Oddo, Loredana Zollo, Sergio Silvestri, Eugenio Guglielmelli

Citations: 104 • 2014

Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger

Haseena Bashir Muhammad, Calogero Maria Oddo, Lucia Beccai, Carmine Tommaso Recchiuto, Carl Anthony, M.J. Adams, Maria Chiara Carrozza, D.W.L. Hukins, Mike Ward

Citations: 104 • 2010

Contactless acoustic micro/nano manipulation: a paradigm for next generation applications in life sciences

Sumit Mohanty, Islam S. M. Khalil, Sarthak Misra

Citations: 102 • 2020

Microfluidic Tissue Engineering and Bio‐Actuation

Miriam Filippi, Thomas Büchner, Öncay Yaşa, Stefan Weirich, Robert K. Katzschmann

Citations: 102 • 2022

A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication

Yang Ge, J. A. Gaines, Bradley J. Nelson

Citations: 98 • 2003

Skin-inspired electronics: emerging semiconductor devices and systems

Zhong Ma, Desheng Kong, Lijia Pan, Zhenan Bao

Citations: 94 • 2020

Ink-Jet Printing of Micro-Electro-Mechanical Systems (MEMS)

Gih‐Keong Lau, Milan Shrestha

Citations: 92 • 2017

Scanning Micromirror Platform Based on MEMS Technology for Medical Application

Eakkachai Pengwang, Kanty Rabenorosoa, Micky Rakotondrabe, Nicolas Andreff

Citations: 89 • 2016