Ashing

Related papers: 1

Top Researchers

Fujio Terai

Institution: —

Takeshi Yamauchi

Institution: —

Masaaki Furuya

Institution: —

Masaaki Kano

Institution: —

Katsuaki Aoki

Institution: —

Katsuya Yamada

Institution: —

Koichi Tamai

Institution: —

Hidehito Azumano

Institution: —

Top Cited Papers

Plasma ashing using microwaves via slot antenna for 300-mm wafers

Masaaki Furuya, Masaaki Kano, Fujio Terai, Katsuaki Aoki, Takeshi Yamauchi, Katsuya Yamada, Koichi Tamai, Hidehito Azumano

Citations: 2 • 1999

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