Hengky Chandrahalim
Papers
2
Total Citations
22
H-Index
2
About
Hengky Chandrahalim is a researcher specializing in microelectromechanical systems (MEMS), with a particular focus on piezoelectric transduction, resonator design, and integrated sensing and actuation technologies. His work has made meaningful contributions to the development of PiezoMEMS devices — systems that unify actuation and sensing within a single fabrication process — enabling advances in high-frequency filters, transformers, and millimeter-scale robotics. His 2010 paper on integrated PiezoMEMS actuators and sensors, which has garnered 18 citations, demonstrated the feasibility of lead-based piezoelectric MEMS platforms and helped lay groundwork for compact, multifunctional microsystems. More recently, Chandrahalim has turned his attention to the radiation resilience of MEMS resonators, investigating how silicon ion irradiation affects aluminum nitride-transduced devices — research with direct implications for space applications such as CubeSats and micro-aerial vehicles, where small, low-power sensors must withstand harsh radiation environments. This 2023 study has already attracted 4 citations, reflecting growing interest in radiation-hardened microsystems. Across his career, Chandrahalim has consistently bridged fundamental device physics with practical engineering challenges, advancing MEMS technology for demanding real-world applications.
Research Focus
Key Achievements
Top Papers
- 1Integrated PiezoMEMS actuators and sensors18 citations · 2010
- 2