Chanmin Su

Shenyang Institute of Automation, Veeco (United States)

Papers

Total Citations

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About

Chanmin Su is a leading figure in the development of advanced metrology for micro- and nanoscale systems, with a primary focus on atomic force microscopy (AFM) and laser-based vibration measurement. His work bridges fundamental mechanics and practical instrumentation, enabling precise characterization of dynamic biological and engineered structures. Su’s major contributions include pioneering multi-mode AFM sensing, where he modeled the cantilever as a flexible beam to enhance topographic imaging in tapping mode—a foundational concept for high-resolution surface analysis. He has also advanced scanning laser Doppler vibrometry (SLDV), developing novel single-point continuous and interval scanning methods that overcome traditional limitations in measuring spatial vibration and displacement. This work has direct applications in industrial quality control, entomology, and biomedical testing. More recently, Su has explored bio-syncretic robotics, using microspheres to achieve axial plane nanoscale measurements of cardiomyocytes, inspired by natural actuation mechanisms. With over 20 citations across his most influential papers, his research is shaping the next generation of sensing tools for soft matter, cellular mechanics, and precision robotics.