B. Cordts

Papers

Total Citations

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About

B. Cordts is a leading figure in the field of ion implantation technology, with a focused expertise in the production of silicon-on-insulator (SOI) materials, particularly Separation by IMplantation of OXygen (SIMOX) wafers. His most notable contribution is his work on the Ibis 1000 SIMOX production implanter, a second-generation system that has been instrumental in the commercial manufacture of high-quality SIMOX wafers since June 1995. Cordts’s research directly enabled the reliable production of 150 mm and 200 mm wafers, achieving exceptional implant uniformity and repeatability—critical factors for advanced semiconductor manufacturing. His 2002 paper on this system, which has garnered 3 citations, details key innovations including a newly designed ion source and analyzer that enhanced process control. While his citation count is modest, the practical impact of his work is substantial, as his contributions helped establish a foundational technology for SOI substrates used in high-performance integrated circuits. Cordts’s achievements underscore his role in bridging research and industrial-scale production in ion implantation.