OTHER
IMPHEAT-II, a novel high temperature ion implanter for mass production of SiC power devices
Yusuke Kuwata, Shiro Shiojiri, Akihito Nakanishi, Shinsuke Inoue, Masakazu Adachi, Yuya Hirai, Koyu Ueno, Jian Wang, Nobuhiro Uji, Hideo Nagamori, Johnny Masa, H Shirakawa, Kensuke Yuasa, Yoshiyuki Nakazawa, Ryosuke Goto, S. K. Hahto, George Sacco, Shigehisa Tamura, Koichi Orihira, Masatoshi Onoda
- Year
- 2022
- Citations
- 7
Keywords
Materials scienceThroughputWaferIon implantationOptoelectronicsEngineering physicsPower (physics)Reliability (semiconductor)Ion beamElectrical engineering
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