Silicon nitride

Fabrication of porous silicon nitride ceramics using binder jetting technology

L. N. Rabinskiy, A. V. Ripetsky, С. А. Ситников, Yury Solyaev, R Kahramanov

Citations: 51 • 2016

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Claudio Abels, Vincenzo Mastronardi, Francesco Guido, Tommaso Dattoma, Antonio Qualtieri, William Megill, Massimo De Vittorio, Francesco Rizzi

Citations: 50 • 2017

Damage evolution and contact surfaces analysis of high-loaded oscillating hybrid bearings

Ilaria Ghezzi, Eymard W. Houara Komba, Davide Tonazzi, Nathalie Bouscharain, G. Le Jeune, Jean-Baptiste Coudert, Francesco Massi

Citations: 31 • 2018

Tribological performance of ceramics in lubricated ultrasonic motors

Wei Qiu, Yosuke Mizuno, Kentaro Nakamura

Citations: 26 • 2016

New R-SiC extends service life in kiln furniture

Andreas Sonntag

Citations: 13 • 1997

Ultra-lightweight silicon nitride truss-based structures fabricated via UV-assisted robot direct ink writing

Anna De Marzi, Sarah Diener, Alberto Campagnolo, Giovanni Meneghetti, Nikolaos Katsikis, Paolo Colombo, Giorgia Franchin

Citations: 12 • 2024

Spectroscopic ellipsometry: a new tool for “on line” quality control

D. Zahorski, J. L. Mariani, L. Escadafals, Jean-Paul Gilles

Citations: 10 • 1993

Silicon immersion gratings and their spectroscopic applications

Jian Ge, Bo Zhao, Scott Powell, Adam Fletcher, Xiaoke Wan, Liang Chang, Hali Jakeman, Dimitrios Koukis, D. B. Tanner, Dennis Ebbets, Jonathan M. Weinberg, Sarah Lipscy, Rich Nyquist, John Bally

Citations: 8 • 2012

Development of a Cluster Tool and Analysis of Deposition of Silicon Oxide by TEOSO₂ PECVD

Nilton Itiro Morimoto, Jacobus W. Swart

Citations: 8 • 1996

Tunnel silicon nitride manipulated reconfigurable bi-mode nociceptor analog

Chengdong Yang, Yilong Liu, Linlin Su, Xinwei Li, Lihua Xu, Qimei Cheng

Citations: 6 • 2024

Fabrication of magnetic helical microribbons made of nickel thin films sandwiched between silicon nitride layers for microswimming applications

Milad Shojaeian, Hakan Osman Çaldağ, Ayhan Bozkurt, Serhat Yeşilyurt

Citations: 5 • 2022

Fast Formation of Lipid Bilayer Membranes for Simultaneous Analysis of Molecular Transport Using Parylene Coated Chips

Tanzir Ahmed, Sander van den Driesche, Martin Oellers, Roland Hemmler, Karsten Gall, Satya Prathyusha Bhamidimarri, Mathias Winterhalter, Richard Wagner, Michael J. Vellekoop

Citations: 5 • 2018

Processtng and Mechanical Properties of Silicon Nitride Formed by Robocasting Aqueous Slurries

Guoping He, Deidre A. Hirschfeld, Joseph Cesarano

Citations: 5 • 2008

Spatially selective biomolecules immobilization on silicon nitride waveguides through contact printing onto plasma treated photolithographic micropattern: Step-by-step analysis with TOF-SIMS chemical imaging

Katarzyna Gajos, Andrzej Budkowski, Panagiota Petrou, Kamil Awsiuk, Κωνσταντίνος Μισιακός, I. Raptis, Sotirios Kakabakos

Citations: 4 • 2019

Impact of Silicon Ion Irradiation on Aluminum Nitride‐Transduced Microelectromechanical Resonators

David D. Lynes, Joshua Young, Eric Lang, Hengky Chandrahalim

Citations: 4 • 2023

Thermal wavefront imaging using GHz ultrasonics

Mamdouh Abdelmejeed, Justin Kuo, Amit Lal

Citations: 2 • 2017

Investigation and Reduction of Systematic Defects by Wafer Backside Process in Nanometer Semiconductor Manufacturing

Jiangang Zhou, Hungling Chen, Yin Long, Kai Wang, Hao Guo

Citations: 1 • 2020