Etching (microfabrication)

A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication

Yang Ge, J. A. Gaines, Bradley J. Nelson

Citations: 98 • 2003

Magnetothermal Microfluidic‐Assisted Hierarchical Microfibers for Ultrahigh‐Energy‐Density Supercapacitors

Hui Qiu, Hengyang Cheng, Jinku Meng, Guan Wu, Su Chen

Citations: 78 • 2020

A simple route to fabricate artificial compound eye structures

Pubo Qu, Feng Chen, Hewei Liu, Qing Yang, Jing Lu, Jinhai Si, Yiqing Wang, Xun Hou

Citations: 78 • 2012

Nanowire-assisted freestanding liquid metal thin-film patterns for highly stretchable electrodes on 3D surfaces

Minwoo Kim, Chulmin Cho, Wooseop Shin, Jung Jae Park, Jaewon Kim, Phillip Won, Carmel Majidi, Seung Hwan Ko

Citations: 69 • 2022

A Review on Fabrication and Application of Tunable Hybrid Micro–Nano Array Surfaces

Chao Li, Junjun Yang, Wenjun He, Mengyuan Xiong, Xinsheng Niu, Xiaoyan Li, Deng‐Guang Yu

Citations: 69 • 2023

A Highly Sensitive and Cost‐Effective Flexible Pressure Sensor with Micropillar Arrays Fabricated by Novel Metal‐Assisted Chemical Etching for Wearable Electronics

Xinyu Zhang, Yougen Hu, Han Gu, Pengli Zhu, Wenlong Jiang, Gang Zhang, Rong Sun, Ching‐Ping Wong

Citations: 63 • 2019

A new uniaxial accelerometer in silicon based on the piezojunction effect

Robert Puers, Louise Reynaert, W. Snoeys, Willy Sansen

Citations: 47 • 1988

Flexible and highly sensitive three-axis pressure sensors based on carbon nanotube/polydimethylsiloxane composite pyramid arrays

Young Jung, Kyung Kuk Jung, Dong‐Hwan Kim, Dong Hwa Kwak, Seokyoung Ahn, Jeong Sam Han, Jong Soo Ko

Citations: 45 • 2021

High Performance, High Density RDL for Advanced Packaging

Chengpu Yu, Luo‐Ting Yen, C. Y. Hsieh, Jeng-Sheng Hsieh, Victor C. Y. Chang, C.H. Hsieh, C. S. Liu, C. T. Wang, KC Yee, Doug C. H. Yu

Citations: 43 • 2018

A three-axis high-resolution capacitive tactile imager system based on floating comb electrodes

Rajesh Surapaneni, Qingbo Guo, Yannan Xie, Darrin J. Young, C. H. Mastrangelo

Citations: 43 • 2013

Through-Glass Vias for Glass Interposers and MEMS Packaging Applications Fabricated Using Magnetic Assembly of Microscale Metal Wires

Miku J. Laakso, Simon J. Bleiker, Jessica Liljeholm, Gustaf Mårtensson, Mikhail Asiatici, Andreas Fischer, Göran Stemme, Thorbjörn Ebefors, Frank Niklaus

Citations: 38 • 2018

Additive Manufacturing of Nanostructures That Are Delicate, Complex, and Smaller than Ever

Andrew J. Gross, Katia Bertoldi

Citations: 34 • 2019

Fully Programmable Collective Behavior of Light‐Powered Chemical Microrobotics: pH‐Dependent Motion Behavior Switch and Controlled Cancer Cell Destruction

Lukáš Děkanovský, Yulong Ying, Jaroslav Zelenka, Jan Plutnar, Seyyed Mohsen Beladi‐Mousavi, Ivana Křížová, Filip Novotný, Tomáš Ruml, Martin Pumera

Citations: 33 • 2022

3D force sensors for laparoscopic surgery tool

J Radó, Csaba Dücső, Péter Földesy, Gábor Szebényi, Zbigniew Nawrat, Kamil Rohr, Péter Fürjes

Citations: 32 • 2017

High-Uniformity Submicron Gratings with Tunable Periods Fabricated through Femtosecond Laser-Assisted Molding Technology for Deformation Detection

Yang Liu, Xiaowei Li, Ji Huang, Zhipeng Wang, Xiaoming Zhao, Bingquan Zhao, Lan Jiang

Citations: 30 • 2022

Magnetothermal Microfluidic‐Assisted Hierarchical Microfibers for Ultrahigh‐Energy‐Density Supercapacitors

Hui Qiu, Hengyang Cheng, Jinku Meng, Guan Wu, Su Chen

Citations: 27 • 2020

Dual‐Band Laser Selective Etching for Stretchable and Strain Interference‐Free Pressure Sensor Arrays

Hongwei Xie, Zhenlong Huang, Jiawei Wan, Rui Zhou, Tao Chen, Yizhuo Wang, Longpeng Yang, Junjie Ji, Yan Jiang, Tailong Wu, Jing Liu, Taisong Pan, Binbin Jiang, Jia Zhu, Guang Yao, Min Gao, Yuan Lin

Citations: 25 • 2024

Silicon based affinity biochips viewed with imaging ellipsometry

Danny van Noort, Jens Rumberg, Edwin W. H. Jager, Carl‐Fredrik Mandenius

Citations: 24 • 2000

Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory

Jean‐Yves Rauch, Olivier Lehmann, Patrick Rougeot, Joël Abadie, Joël Agnus, Miguel Ángel Suárez

Citations: 24 • 2018

Polydimethylsiloxane as polymeric protective coating for fabrication of ultra-thin chips

Shoubhik Gupta, Anastasios Vilouras, Ravinder Dahiya

Citations: 23 • 2019