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About
Shan Zeng is a leading researcher in semiconductor manufacturing automation, with a primary focus on optimizing cluster tool scheduling to enhance wafer fabrication efficiency. Their work addresses critical challenges in single-arm cluster tools equipped with multi-space process modules (PMs), where multiple wafers are processed concurrently within a single chamber. Zeng’s key contribution lies in developing novel scheduling algorithms that minimize wafer delay by precisely coordinating robot movements and PM rotations—a complex problem involving concurrent wafer handling and chamber indexing. By modeling the internal rotation of multi-space PMs, their research enables significant throughput improvements in advanced semiconductor fabs. While their most-cited paper (2024) has garnered 2 citations, this reflects the emerging nature of their work in a highly specialized field. Zeng’s achievements include advancing the theoretical framework for cluster tool scheduling with multi-space PMs, a topic of growing industrial relevance as chip manufacturers push for higher productivity. Their research is particularly valuable for engineers and researchers seeking to bridge the gap between theoretical scheduling models and real-world semiconductor equipment constraints.
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