Designing Novel MEMS Cantilevers for Marine Sensing Robots Using COMSOL Modeling and Different Piezoelectric Materials

Abstract

The present work presents an innovative marine sensing robotics device based on piezoelectric cantilever-integrated micro-electro-mechanical systems (MEMSs) modeled on fish lateral lines. The device comprises 12 cantilevers of different shapes and sizes in a cross-shaped configuration, embedded between molybdenum (Mo) electrodes in a piezoelectric thin film (PbTiO3, GaPO4). It has the advantage of a directional response due to the unique design of the circular cantilevers. In COMSOL software 5.5, we designed, modeled, and simulated a piezoelectric device based on a comparative study of these piezoelectric materials. Simulations were performed on cantilever microstructures ranging in length from 100 µm to 500 µm. These materials perform best when lead titanate (PbTiO3) is used. A maximum voltage of 4.9 mV was obtained with the PbTiO3-material cantilever with a displacement of 37 µm. A laser Doppler vibrometer was used to measure the resonance frequency mode and displacement. Our simulations and experiments were in good agreement. Its performance and compactness allow us to envision its employment in underwater acoustics for monitoring marine cetaceans and ultrasound communications. In conclusion, MEMS piezoelectric transducers can be used as hydrophones to sense underwater acoustic pulses.