OTHER
Kinematic Structure of a Parallel Robot for MEMS Fabrication
Hagay Bamberger, Moshe Shoham
- Year
- 2004
- Citations
- 3
Keywords
KinematicsRevolute jointMicroelectromechanical systemsInverse kinematicsActuatorFabricationParallel manipulatorRobotRobot kinematicsBase (topology)
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