Highly Sensitive Flexible Capacitive Pressure Sensor Based on Bionic Hybrid Microstructures

Abstract

Flexible capacitance pressure sensors have shown excellent application potential in biomedical equipment, human-computer interaction, and robotics. Herein, we propose a flexible capacitive pressure sensor based on bionic hybrid microstructures (BHM) which consists of micro-cones by facile replication of the surface of Calathea zebrina leaf and mini-domes by vacuum adsorption from through-hole arrays, respectively. The sensor presents a high pressure sensitivity of 3.17 kPa <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> , and wide detection range. These promising advantages of the pressure sensor enable continuous pulse signal monitoring and heart condition analyzing of human body. This work highlights the potential of the pressure sensor in a wide range of applications, including wearable devices, robots, and human-machine interaction.