Piezo impact type MEMS rotary actuator and application to millimeter size AI controlled robot

Abstract

Microrobotic systems are increasingly used in medicine and other fields requiring precision engineering. This paper proposes a piezo impact-type rotary actuator and applies it to a millimeter-size robot controlled by an artificial intelligence (AI) system. The rotary actuator and robot are fabricated by micro electro mechanical systems (MEMS) technology using a silicon wafer. The actuator is composed of multilayer piezoelectric elements. The rotational motion of the rotor is generated by the impact head attached to the piezoelectric element. The millimeter-size robot is fitted with six legs on either side of the developed actuator, and can walk on uneven surfaces like an insect. The three leg parts are connected by a link mechanism. The control system is constructed from analog electronic circuits that mimic the behavior of biological neurons. The output signal ports of the controller are connected to the multilayer piezoelectric element. This robot system requires no specialized software programs or A/D converters. The rotation speed of the rotary actuator reaches 60 rpm at an applied AI frequency of 25 kHz. The sideways, endways, and height dimensions of the robot are 4.0, 4.6, and 3.6 mm, respectively. The motion speed is 180.0 mm/min.