LTPS TFT technology on flexible substrates for sensor applications

Abstract

Flexible sensors are gaining increasing interest in a number of applications, including biomedical, food control, domotics and robotics, having very light weight, robustness and low cost. Low temperature polycrystalline silicon (LTPS) technology is particularly attractive for such applications, since LTPS TFTs show excellent electrical characteristics, good stability and offer the possibility to exploit CMOS architectures. Then, as examples of flexible sensing systems, we present a tactile sensor for robotic applications and a pH sensor for biomedical applications. The present results can pave the way to advanced flexible sensing systems, where sensors and local signal conditioning circuits can be integrated on the same flexible substrate.