High‐speed and high‐precision position control using a sliding mode compensator

Abstract

Abstract To achieve high‐speed, high‐precision position control for semiconductor product machines and industrial robots, full‐closed feedback control is applied. Many control methods have been proposed for such a system. In general, proportional position control and proportional plus integral velocity control or integral plus proportional velocity control (P,PI/I‐P), which is a type of proportional plus integral plus differential control (PID), is applied in many industrial applications. However, in the case of changing mechanical characteristics of the control target, the parameters of P,PI/I‐PI control must also change in order to maintain good motion performance. In this paper, we propose a new P,PI/I‐P control method that includes a nonlinear compensator. The algorithm of the nonlinear compensator is based on sliding mode control with chattering compensation. The effectiveness of the proposed control method is evaluated using a full‐closed single‐axis slider system via point‐to‐point control and contour control in the case of changing load. The experimental results indicate that the proposed control method is robust in the case of changing acceleration/deceleration of control reference, changing load, and low‐velocity contour motion. © 2010 Wiley Periodicals, Inc. Electr Eng Jpn, 174(2): 65–71, 2011; Published online in Wiley Online Library ( wileyonlinelibrary.com ). DOI 10.1002/eej.21011