Deformation-adaptive pressure sensors based on multi-level discrete sensing arrays for morphing electronics and human–machine interaction

Abstract

Stretchable pressure sensors are essential for intelligent machine perception and human-machine interactions, yet their accuracy is often compromised by deformation, due to limited strain tolerance of continuous-structure sensing materials. To resolve this issue, we propose a multi-level discrete array strategy to fabricate superior deformation-adaptive sensors. Then, an innovative and eco-friendly approach is developed to fabricate micro-nano hierarchical ZnO arrays through combined plasma-enhanced atomic layer deposition and hydrothermal growth. The micro-scale pattern acts as first-level discrete structure, enabling high stretchability of sensor, while ZnO nanorods function as the secondary structure to dissipate interfacial shear stress. This multi-level design ensures 98.2% strain insensitivity even under 100% strain, and the sensor exhibits a 1 Pa detection limit and dynamic monitoring capability during dynamic deformation, validating its potential in morphing electronics. Notably, this approach can create a sensing array with different sensitivities by adjusting the ZnO area ratios. The resulting E-skin serves as a human–machine interface for controlling robotic hand movements, which requires only a single pair of electrodes and doesn’t need external power source.