Characterization of Balloon-Jointed Micro-Fingers

Abstract

A micro-finger structure articulated by pneumatically controlled micro balloon joints is characterized for its force capability. The micro-finger, being developed as a building component for future micro-robotics, is made of thick (>100 μm) silicon segments closely jointed by micro balloons made of Parylene thin film. The thick silicon structure and the small gap in between provide strength and stiffness that are desirable in micro-robots. The force characterization of the microfingers, obtained from a simple experimental setup, demonstrates that the micro-finger can apply 1.2 mN force at 60 psi pneumatic actuation. The effective stiffness of the micro-finger is also obtained. The increasing stiffness under higher pressure suggests that the micro-fingers can exert stronger force by increasing pressure, showing the advantage of the active grasping mechanism.