Flexible Thermal Actuator Film for Monolithic Soft Micro Robot Process

Abstract

Patternable actuator film for monolithic soft micro robot process was developed. The film is consisted from thermal bimorph actuation layer and extra functional layer including driving heater layer and elastic mechanical buffer layer. A cantilever arm actuator fabricated by patterning the film was operated with 2 V applied voltage. Multi actuator device or micro robot can be fabricated without assembling process by appropriate patterning process with this film.