A Novel Six Degrees-of-Freedom Parallel Robot for MEMS Fabrication

Abstract

This paper introduces a new architecture of a six degrees-of-freedom parallel robot suitable for microelectromechanical systems (MEMS) fabrication. The robot consists of only revolute joints for the passive joints, and linear actuators located at the base for the active ones, both of which are easier to manufacture in MEMS technology. The hybrid kinematic structure contains three single-loop submechanisms connected in parallel to the moving platform. The solutions of the inverse and direct kinematics problems are presented