OTHER
Capacitive flexible pressure sensor: microfabrication process and experimental characterization
Thi Hong Nhung Dinh, Emile Martincic, Elisabeth Dufour‐Gergam, Pierre-Yves Joubert
- Year
- 2015
- Citations
- 15
Keywords
Materials scienceFabricationMicrofabricationPolydimethylsiloxaneCapacitanceCapacitive sensingWaferPressure sensorKaptonOptoelectronics
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