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Capacitive flexible pressure sensor: microfabrication process and experimental characterization

Thi Hong Nhung Dinh, Emile Martincic, Elisabeth Dufour‐Gergam, Pierre-Yves Joubert

发表年份
2015
引用次数
15

关键词

Materials scienceFabricationMicrofabricationPolydimethylsiloxaneCapacitanceCapacitive sensingWaferPressure sensorKaptonOptoelectronics

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