Nanolithography
相关论文数: 20
顶级研究者
最高引用论文
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引用数: 20 • 2005
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Massively Parallel Nanorobotics for Lithography and Data Storage
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引用数: 15 • 1999
Localized Photoactuation of Polymer Pens for Nanolithography
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引用数: 14 • 2023
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引用数: 12 • 2009
Design of Elastomer-CNT Film Photoactuators for Nanolithography
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引用数: 11 • 2019
Large area micro-/nano-structuring using direct laser interference patterning
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Hybrid nanorobotic approaches for fabricating NEMS from 3D helical nanostructures
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引用数: 10 • 2006
Design of a micro-cartridge system for the robotic assembly of exchangeable AFM-probe tips
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引用数: 7 • 2013