Ion implantation
相关论文数: 6
顶级研究者
最高引用论文
IMPHEAT-II, a novel high temperature ion implanter for mass production of SiC power devices
Yusuke Kuwata, Shiro Shiojiri, Akihito Nakanishi, Shinsuke Inoue, Masakazu Adachi, Yuya Hirai, Koyu Ueno, Jian Wang, Nobuhiro Uji, Hideo Nagamori, Johnny Masa, H Shirakawa, Kensuke Yuasa, Yoshiyuki Nakazawa, Ryosuke Goto, S. K. Hahto, George Sacco, Shigehisa Tamura, Koichi Orihira, Masatoshi Onoda, Yoshinobu Hayashi, Takashi Sakamoto, Wei‐Jiang Zhao
引用数: 7 • 2022
Mechanically scanned ion implanters with two-axis disk tilt capability
T. Tamai, Michael P. Diamond, Brenda Doherty, P. Splinter
引用数: 6 • 1991
A 100 mA class ion implanter for large scale production of buried oxide SOI wafers
S. Moffatt
引用数: 3 • 1987
The Ibis 1000 SIMOX production implanter
G. Ryding, T.H. Smick, M. Farley, B. Cordts, R. Dolan, L.P. Allen, Bryan H C Mathews, W. Wray, B. Amundsen, M.J. Anc
引用数: 3 • 2002
Production high-energy ion implanters with milliampere beam capabilities
P. Boisseau, A. Dart, A.S. Denholm, H.F. Glavish, Bruce Libby, G. K. Simcox
引用数: 2 • 1989
Linear-accelerator-based high energy implanter with milliampere capability
P. Boisseau, A.S. Denholm, H.F. Glavish, G. K. Simcox
引用数: 2 • 1989