Three Key Technologies of Micro Systems

摘要

In this paper, three key technologies of 3D fabrication of micro systems, manufacturing of spatial motion mechanisms, and micro manipulation,are reviewed. Definition of micro systems is given. The features in which micro systems are different from macro systems and micro electron systems,and how these features effect on three key technologies above are surveyed. Three dimensional fabrication methods, such as LIGA, DRIE, EDM, micro relief, folding and RPM are described. These methods are related for commercialization need of micro optical systems, micro fluid systems and micro mechanisms. It is described how to design and manufacture micro motion pairs and micro mechanisms with elastic and flexible deformation parts. Suggestions of selecting rules of the design and manufacturing are given. Four methods such as manipulating micro objects in fluid, micro injection, manipulation in narrow space, and micro manipulation of worktable-robot systems are put forward. Finally, key research problem groups of micro systems are presented.