OTHER
Diagnosis and Reduction of Robot Arm Vibration for 12-Inch Wafer Spin Scrubber
Noh Yu Kim, Min Sung Hong
- 发表年份
- 2004
- 引用次数
- 7
关键词
Reduction (mathematics)ScrubberVibrationWaferRobotic armRobotMaterials scienceAutomotive engineeringMechanical engineeringComputer science
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