“Pocket Factory”: Concept of miniaturized modular cleanrooms

摘要

The manipulation and assembly of microsystems (MEMS) require accurate robots operating in a clean room environment. Available systems are bulky, thus requiring large ground surface for small components. Furthermore they have limited accuracy. The main objective of the 'Pocket-factory' project is to develop miniaturized and modular clean production units for microsystems and establish a methodology to quickly set them up