Simulation of SU-8 Frequency-Driven Scratch Drive Actuators

摘要

This paper presents the simulation of Scratch Drive Actuators (SDAs) for micro-robotic applications. SDAs use electrostatic forces to generate motion on top of an interdigitated electrode array. The purpose of this investigation is to evaluate several design geometries and micro-actuator configurations using ConventorWare®'s finite element analysis module. The study performed investigates the SDAs modal and electrostatic behavior and the effects of linking two or more SDAs together in a micro- robot device. In addition, the interdigitated electrode array performance, used for power delivery, was studied by changing the thickness of its dielectric layer. We present our observations based on these studies, which will aid in the understanding and development of future SDA designs.